| Direction of travel |
X axis one direction |
| Travel |
±10mm |
| Stage size |
50mm×50mm |
| Motor used |
Equivalent to PK523HPB(5 wire type pentagonal connection 0.75A/phase) |
| Resolution |
0.002mm |
| Lead screw |
1mm |
| Guiding method |
HG-VCR（V-grooved and Crossed roller） |
| Travel accuracy HV |
Straightness(horizontal and vertical)0.002mm |
| Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
| Positioning accuracy |
0.008mm |
| Repeatability |
±0.0003mm |
| Lost motion |
0.001mm |
| Momentum parallelism |
0.015mm |
| Moment rigidity |
Yaw rigidity 0.15sec/N・cm, Pitch rigidity 0.2sec/N・cm, Roll rigidity 0.2sec/N・cm |
| Load capacity |
49N（5kgf） |
| Weight |
0.43kg |
| Maximum speed |
16mm/s（8,000pps） |
| Material / Surface treatment |
Aluminium alloy / Black alumite |
| ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Compatible cable |
ACB-STM2,ACB-STM3 |
| Scale model |
Made of GSI Mercury（Glass scale,cable length3m） |
| Scale resolution |
5μm～0.05μm |
| Scale accuracy |
±60nm/0.02mm |