Direction of travel |
XY axis two directions |
Travel |
±12.5mm |
Stage size |
60mm×60mm |
Motor used |
Equivalent to PK523HPB (5 wire type pentagonal connection 0.75A /phase) |
Resolution |
0.002mm |
Lead screw |
1mm |
Guiding method |
V-grooved and Crossed roller |
Travel accuracy HV |
Straightness(horizontal and vertical)0.002mm |
Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
Positioning accuracy |
0.01mm |
Repeatability |
±0.0003mm |
Lost motion |
0.001mm |
Momentum parallelism |
0.02mm |
Perpendicularity |
0.006mm |
Moment rigidity |
Yaw rigidity 0.2sec/N・cm, Pitch rigidity 0.2sec/N・cm, Roll rigidity 0.2sec/N・cm |
Load capacity |
39.2N(4kgf) |
Weight |
1.1kg |
Maximum speed |
16mm/s(8,000pps) |
Material / Surface treatment |
Aluminium alloy / Black alumite |
ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
Compatible cable |
ACB-STM2,ACB-STM3 |
Scale model |
Made of GSI Mercury(Glass scale,cable length3m) |
Scale resolution |
5μm~0.05μm |
Scale accuracy |
±60nm/0.02mm |