| Direction of travel |
XY axis two directions |
| Travel |
±25mm |
| Stage size |
125mm×160mm |
| Motor used |
Equivalent to PK545NBW (5 wire type pentagonal connection 0.75A / phase) |
| Resolution |
0.002mm |
| Lead screw |
1mm |
| Guiding method |
V-grooved and Crossed roller |
| Travel accuracy HV |
Straightness(horizontal and vertical)0.0008mm |
| Positioning accuracy |
0.003mm |
| Repeatability |
±0.0005mm |
| Lost motion |
0.0005mm |
| Perpendicularity |
0.008mm |
| Moment rigidity |
Yaw rigidity 0.1sec/N・cm, Pitch rigidity 0.08sec/N・cm, Roll rigidity 0.08sec/N・cm |
| Load capacity |
314N（32kgf） |
| Weight |
16.4kg |
| Maximum speed |
16mm/s（8,000pps） |
| Material / Surface treatment |
Steel material / Kanigen plating （table）,painting（Bases） |
| ORG sensor |
Normally open contact (make contact, A contact), Photo sensor |
| Pre-ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Compatible cable |
ACB-STD2,ACB-STD3 |