Direction of travel |
Z axis one direction |
Travel |
±15mm |
Stage size |
70mm×70mm |
Motor used |
Equivalent to PK523HPB (5 wire type pentagonal connection 0.75A / phase) |
Resolution |
0.002mm |
Lead screw |
1mm |
Guiding method |
HG-VCR(V-grooved and Crossed roller) |
Travel accuracy HV |
Straightness(horizontal and vertical) 0.002mm |
Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
Positioning accuracy |
0.012mm |
Repeatability |
±0.0003mm |
Lost motion |
0.001mm |
Moment rigidity |
Yaw rigidity 0.06sec/N・cm, Pitch rigidity 0.08sec/N・cm, Roll rigidity 0.08sec/N・cm |
Load capacity |
19.6N(2kgf) |
Weight |
0.93kg |
Maximum speed |
10mm/s(5,000pps) |
Material / Surface treatment |
Aluminium alloy / Black alumite |
ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
Compatible cable |
ACB-STM2,ACB-STM3 |
Scale model |
Made of GSI Mercury(Glass scale,cable length3m) |
Scale resolution |
5μm~0.05μm |
Scale accuracy |
±60nm/0.02mm |