Manual Stages & Others -CHUO PRECISION INDUSTRIAL CO.,LTD.-

“Deviation from the geometrical straight line of the component in a straight line movement.”
From the standard position, positioning is carried out sequentially in one direction. At each position, displacement length and deviation from the standard position are set as the measurement value of the position.
The maximum difference with the geometric straight line connecting the standard position and the last measuring position is set as “straightness.”
The straightness is expressed in two directions, which are horizontal direction and vertical direction.

Yawing and pitching [JIS B 6191-1993 complied]

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“Deviation of the object posture while the object is in a straight line movement, and a standard length of the transfer amount. Angle deviation that occurs during a straight line movement of the object. From the standard position, positioning is carried out sequentially in one direction. Then, the displacement angle at each position, in a horizontal direction to the standard position, is called “yawing.”
Similarly, the displacement angle at each position, in a vertical direction to the standard position, is called “pitching”.

Allowance moment [JIS B 6201-1993 compliant]

The moment load that can be applied to when the stages are assembled or when components are attached to the stage is called “allowance moment.” There are several types of allowance moment depending on the moment load direction and the stage type. In X, XY, and Z stages, there are three types, allowance moment (yaw), allowance moment (pitch), and allowance moment (roll). In rotation stage, there is an allowance moment, and in an oblique stage, there are two types, allowance moment (yaw) and allowance moment (roll).

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Moment rigidity [JIS B 6201-1993 compliant]

Displacement angle (sec) of the manual stage due to moment load per 1 N•cm is called “moment rigidity.” There are several types of moment rigidities depending on the moment load direction and the manual stage type. In X axis, XY axis, and Z axis stages, there are three types, yaw rigidity, pitch rigidity, and roll rigidity. In the rotation stage, there is moment rigidity. As smaller the moment rigidity value is, the automatic stage displacement due to moment load gets smaller, representing a good rigidity.

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Moment rigidity of X axis, XY axis, Z axis stages
　1. Moment rigidity (yaw rigidity)
　2. Moment rigidity (pitch rigidity)
　3. Moment rigidity (roll rigidity)
　In case of the XY axis stage, the lower axis is used as a standard.

Moment rigidity of the rotation stage

Parallelism [JIS B 6330-1980 compliant]

“In a combination of plane sections, set one plane as a standard plane. It is the deviation when a plane section is deviated from the geometric plane that is parallel to the standard plane.” Deviation of the plane sections of the table face and base face at the center position of total transfer amount of the stage is set as the parallelism.

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Parallelism/perpendicularity of motion

Deviation of the face and line of the mechanical unit, or of the movement of the moving component that are supposed to be parallel to each other.
The stage is fixed to the standard plane, and positioning is carried out from the standard position toward one direction at a standard interval. Then, at each point, the heights from the standard plane to the measuring unit fixed at the upper surface of the moving stage are measured. Its maximum difference is set as parallelism of the motion.
By placing a square ruler on the standard plane, measurement is carried out for the distance to the measuring unit fixed to the stage surface. Its maximum difference is set as perpendicularity of the motion.

XY orthogonality [JIS B 7440-1987 compliant]

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Perpendicularity between two axes, which intersect at the right angle, is a deviation of the geometrical straight line in a straight line movement to the geometrical straight line, which is the standard for straightness for the motion. Geometrical straight line for straightness (horizontal) at the X axis stage standard position and the final measuring position is set as a standard axis. To X-axis stage standard axis, the maximum horizontal error between the standard position to the final measuring position of Y axis stage to a geometrical straight line that is a right angle is called “XY orthogonality”.

Withstand load

Equally divided load to the stage surface that is load-able to the manual stage is called “withstand load”.

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Mass

It displays the mass of the stage body.

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Main material/surface treatment

It displays the main materials used for the stage and the exterior (plating, paint, etc.).

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RoHS directive corresponding condition

"RoHS directive compliant" is displayed on the product that corresponds to RoHS directive.

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Roundness ［JIS B 6191-1993, B 6194-1997 complied］

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Deviation of a circle to the geometrical circle. All points on the lines on the plane surface are to be between two concentric circles, and it is expressed by the difference of two concentric circles in radius direction when its difference is the smallest. The maximum difference of the measuring value to the geometrical circle is set as the roundness.

Face deflection [JIS B 6191-1993 complied]

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Size that the end section rotating with one center axis deviates from a plane that is perpendicular to the center axis. The maximum deflection of the upper face of the rotation stage to the thrust (perpendicular) direction is called “face deflection”.

Rotation center precision [Company standard of Chuo Precision Industrial Co., Ltd.]

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By setting the distance between the upper surface of the gonio stage to the ideal rotation center as the standard, the maximum difference to the ideal rotation center is measured at the stage positioning.
The diameter of the ball, which uses the maximum difference as a radius, is set as “rotation center precision”.

Feed precision

With the spring loading to the micrometer head spindle, it is designed as it provides a great repeatability and a backlash as small as ignorable. Therefore, the feed precision greatly depends on the feed precision of the micro meter head and the straightness of the stage transfer.
Feed precision is considered important for our stages that apply V-CR method and HG-VCR method for transfer guide (guide method) as they can be used for measurement as well as precise positioning. The following precision standards are set when error factors such as micrometer head precision, stage straightness, and interconnecting precision of both are considered.

　Within (1 + 2L/10) to the stage smaller than 90 mm x 90 mm
　Within (1 + L/10) to the stage with the size between 90 mm x 90 mm to 125 mm x 150 mm
　“L” represents a feed amount (mm).

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