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Automation Product for Microscopes
MICRO SCANNING STAGE FOR FACTORY AUTOMATION
MICRO SCANNING STAGE FOR FACTORY AUTOMATION
MSS-H300AD
1
Micro Scanning Stage
Estimate separately
Travel
XY axis±150mm
Stage size
490mm×490mm
Resolution
0.002mm
YES
Product documentation
YES
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Description
Strongly the use conscious FA, high speed, sudden stop, automatic XY stage is settling a short time possible.
If you repeat the movement for high-speed, sudden stop, to settle at about 60ms, can be scanned in about 17 minutes total inspection range of about 10,000 work places in the pattern of 150mm × 150mm for example.
Repeatability ± 0.001mm for, there's a good reproducibility of the position (φ0.1mm about) in the high magnification microscopic field.
Microscope system can be combined with ultra-fast auto-focus tracking type produced in our company, and delivers the best performance, such as visual inspection.
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Specifications
Travel
XY axis±150mm
Stage size
490mm×490mm
Motor used
Equivalent αstep motor ARM46AC
Resolution
0.002mm
Lead screw
2mm
Guiding method
V-Gap and Cross-Roller
Positioning accuracy 1/10stroke
X axis0.040mm,Y axis0.040mm
Positioning accuracy fullstroke
X axis0.120mm,Y axis0.100mm
Repeatability
±0.002mm
Lost motion
0.003mm
Load capacity
49N(5kg)
Weight
Approximately 15kg body stage, 6.0kg for the driver
Maximum speed
100mm/s
Material / Surface treatment
Aluminum alloy/Black Alumite
ORG sensor
Normally closed contact (break contact, contact B) operation, the photo sensor
Limit sensor
Normally closed contact (break contact, contact B) operation, the photo sensor
Driver model number
QT-ARD2
Input power source
AC100~115V 50/60Hz Max6.0A
Outside dimension(mm)
W200×D280×H200mm(Excluding protrusions)
Number of drive shaft
2-axis
Drive system
2Ph stepping bipola
Drive current
0.49A/Phase
Resolution switching
(Initial value) 0.002mm, (0.004mm, 0.0004mm, 0.0002mm changeable by internal switch)
Direction of travel
XY axis: two direction
Input signal
Drive pulse
(initial value), (a pulse method with changeable internal switch) 2-pulse method: pulse
maximum pulse frequency : 250KHz (50% duty time)
pulse voltage: +5 V
open collector,: form and response signal Line Driver
Compatible Stage
MSS-H200A or MSS-H300 Aonly
Recommendation controller
QT-AMH2,QT-ADM2
Attached cable
AC cable, sensor cable, motor cable, cable for connecting the QT-A controller
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Driver
Operating principle of the Sensor and Timing Chart
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Explanatory diagram
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Supplementation
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MICRO SCANNING STAGE FOR FACTORY AUTOMATION
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