Strongly the use conscious FA, high speed, sudden stop, automatic XY stage is settling a short time possible.
If you repeat the movement for high-speed, sudden stop, to settle at about 60ms, can be scanned in about 17 minutes total inspection range of about 10,000 work places in the pattern of 150mm × 150mm for example.
Repeatability ± 0.001mm for, there's a good reproducibility of the position (φ0.1mm about) in the high magnification microscopic field.
Microscope system can be combined with ultra-fast auto-focus tracking type produced in our company, and delivers the best performance, such as visual inspection.