| Direction of travel |
XYZ and rotary axis four directions |
| Stage size |
φ125mm |
| Clamp method |
XYZ axis Clamp plate,rotary axis Complex clamp |
| Mounting position |
XY axis Reverse side |
| Transfer mechanism |
XY axis MHN1-25T,Z axis CMH-13FM, rotary axis CEH-13R(each axis Standard micrometer head) |
| Travel |
XY axis ±12.5mm, Z axis 0～10mm, rotary coarse360°fine±5° |
| Lead of actuator |
XYZ axis 0.5mm,rotaryaxis Approxi0.39° |
| Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading5′／Micrometer head0.01mm（1 division approx0.008°） |
| Minimum resolution |
XYZ axis 0.003mm |
| Guiding method |
XY axis V-grooved ways and cross rollers,Z axis V-grooved ways and steel balls, rotaryaxis facing up method |
| Travel accuracy |
straightness XY axis 0.003mm,straightness Z axis 0.005mm,circular ityrotary axis 0.05mm, circularity rotary axis 0.03mm |
| Load capacity |
29.4N(3kgf) |
| Weight |
6.6kg |
| Material / Surface treatment |
XY axis steel materials/Hard black chrome,Z axis rotary axis Aluminum alloy/Black Alumite |