Direction of travel |
XYZ and rotary axis four directions |
Stage size |
φ90mm |
Clamp method |
XYZ axis Clamp plate,rotary axis Complex clamp |
Mounting position |
XY axis Side |
Transfer mechanism |
XY axis CMH-15F,Z axis CMH-13FM, rotary axis CEH-13R(each axis Standard micrometer head) |
Travel |
XY axis ±7.5mm, Z axis 0~10mm, rotary coarse360°fine±5° |
Lead of actuator |
XYZ axis 0.5mm,rotaryaxis Approxi0.50° |
Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading5′/Micrometer head0.01mm(1 division approx0.010°) |
Minimum resolution |
XYZ axis 0.003mm |
Guiding method |
XY axis V-grooved ways and cross rollers,Z axis V-grooved ways and steel balls, rotaryaxis facing up method |
Travel accuracy |
straightness XYaxis 0.003mm,straightness Z axis 0.008mm,circula rityrotary axis 0.04mm, circularity rotary axis 0.02mm |
Load capacity |
29.4N(3kgf) |
Weight |
1.75kg |
Material / Surface treatment |
Aluminum alloy/Black Alumite |