Direction of travel |
XYZ and rotary axis four directions |
Stage size |
φ39mm |
Clamp method |
XYZ axis Clamp plate,rotary axis Complex clamp |
Mounting position |
XY axis Side |
Transfer mechanism |
XYZ axis CMH-13RM, rotary CMH-6.5RA(each axis Standard micrometer head) |
Travel |
XY axis ±6.5mm, Z axis 0~10mm, rotary axis coarse360°fine±5° |
Lead of actuator |
XYZ axis 0.5mm,rotaryaxis Approxi0.99° |
Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading10′/Micrometer head0.01mm(1 division approx0.020°) |
Minimum resolution |
XYZ axis 0.003mm |
Guiding method |
XYZ axis HG-VCR(V-grooved ways and cross rollers),rotaryaxis facing up |
Travel accuracy |
straightnessXY axis 0.002mm,Z axis 0.003mm,circularity rotary axis0.05mm, circularity rotary axis0.02mm |
Load capacity |
14.7N(1.5kgf) |
Weight |
0.50kg |
Material / Surface treatment |
XY rotary axis Aluminum alloy/Black Alumite ,Z axis Steel ,Aluminum alloy/Black chromium oxide, Black Alumite |
Supplemental note |
※ For the Z stage is not symmetrical. For more information please check the external view of each product. |