Direction of travel |
XYZ and rotary axis four directions |
Stage size |
φ30mm |
Clamp method |
XYZ axis Clamp plate,rotary axis Complex clamp |
Mounting position |
XY axis Side |
Transfer mechanism |
XY axis CMH-6.5RA,Z axis CMH-6.5F, rotary axis CEH-6.5R(each axis Standard micrometer head) |
Travel |
XY axis ±3mm, Z axis 0~4mm, rotary axis coarse360°fine±5° |
Lead of actuator |
XYZ axis 0.5mm,rotaryaxis Approxi1.36° |
Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading2°/Micrometer head0.01mm(1 division approx0.027°) |
Minimum resolution |
XYZ axis 0.003mm |
Guiding method |
XY axis HG-VCR(V-grooved ways and cross rollers),Z axis V-grooved ways and steel balls, rotaryaxis facing up |
Travel accuracy |
straightnessXY axis 0.002mm,Z axis 0.003mm,circularity rotary axis0.02mm, circularity rotary axis0.02mm |
Load capacity |
9.8N(1kgf) |
Weight |
0.27kg |
Material / Surface treatment |
Aluminum alloy/Black Alumite |
Supplemental note |
※ For the Z stage is not symmetrical. For more information please check the external view of each product. |