| Direction of travel |
XYZ and rotary axis four directions |
| Stage size |
φ70mm |
| Clamp method |
XYZ axis Clamp plate,rotary axis Complex clamp |
| Mounting position |
XY axis Side |
| Transfer mechanism |
XYZ axis CMH-13RM, rotary CMH-6.5RA(each axis Standard micrometer head) |
| Travel |
XY axis ±6.5mm, Z axis 0～10mm, rotary axis coarse360°fine±5° |
| Lead of actuator |
XYZ axis 0.5mm,rotaryaxis Approxi0.70° |
| Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading10′／Micrometer head0.01mm（1 division approx0.014°） |
| Minimum resolution |
XYZ axis 0.003mm |
| Guiding method |
XYZ axis HG-VCR（V-grooved ways and cross rollers）,rotaryaxis facing up |
| Travel accuracy |
straightnessXY axis 0.002mm,Z axis 0.003mm,circularity rotary axis0.04mm, circularity rotary axis0.02mm |
| Load capacity |
29.4N(3kgf) |
| Weight |
1.11kg |
| Material / Surface treatment |
XY rotary axis Aluminum alloy/Black Alumite ,Z axis Steel ,Aluminum alloy/Black chromium oxide, Black Alumite |
| Supplemental note |
※ For the Z stage is not symmetrical. For more information please check the external view of each product. |