The adoption of ceramic sintering method, there is no worry of dust from the inside of porous ceramics, does not pollute the environment.
We will generate a uniform force over the entire surface adsorption surface adsorption. Therefore, it is for the retention of work work a thin vacuum chuck and a hole opens weak, such as films.
Also produced a large platen size, specific gravity of porous ceramics is smaller than the aluminum (specific gravity: 1.6 to 1.8), and so lightweight, you also help to reduce the weight of equipment, etc..