| Direction of travel |
Z axis one direction |
| Travel |
0～20mm |
| Stage size |
125mm×125mm |
| Motor used |
Equivalent to PK543NBW(5-wire type pentagonal connection 0.75A/phase |
| Resolution |
0.001mm |
| Lead screw |
1mm |
| Guiding method |
V-grooved ways and cross rollers |
| Travel accuracy HV |
Straightness(horizontal and vertical)0.005mm |
| Positioning accuracy |
0.01mm |
| Repeatability |
±0.0008mm |
| Lost motion |
0.001mm |
| Parallelism |
0.04ｍｍ |
| Moment rigidity |
Yawing rigidity 1.5sec/N・cm、Pitching rigidity 1.5sec/N・cm、Rolling rigidity 0.05sec/N・cm |
| Load capacity |
98N（10kgf） |
| Weight |
5.5kg |
| Maximum speed |
5mm/s（5,000pps） |
| Material / Surface treatment |
Steel material/Kanigen platin |
| ORG sensor |
Normally open contact（make contact,Ａcontact）operation.Photomicro Sensors |
| Pre-ORG sensor |
Normally closed contact (Break contact, B contact) operation.Photomicro Sensors |
| Limit sensor |
Normally closed contact (Break contact, B contact) operation.Photomicro Sensors |
| Compatible cable |
ACB-STD2、ACB-STD3 |