| Direction of travel |
Z axis one direction |
| Travel |
±75mm |
| Stage size |
200mm×250mm |
| Motor used |
Equivalent to PK545 with electromagnetic brake (5 wire type pentagonal connection 0.75A / phase) |
| Resolution |
0.002mm |
| Lead screw |
1mm |
| Guiding method |
V-grooved and Crossed roller |
| Travel accuracy HV |
Straightness(horizontal and vertical) 0.004mm |
| Travel accuracy YP |
Yawing 20sec, Pitching 30sec |
| Positioning accuracy |
0.015mm |
| Repeatability |
±0.0008mm |
| Lost motion |
0.001mm |
| Moment rigidity |
Yaw rigidity 0.05sec/N・cm, Pitch rigidity 0.6sec/N・cm, Roll rigidity 0.6sec/N・cm |
| Load capacity |
98N（10kgf） |
| Weight |
26.7kg |
| Maximum speed |
10mm/s（5,000pps） |
| Material / Surface treatment |
Steel material,Aluminium（bracke） / Kanigen platin（table）, platin（Bases）,White alumite |
| ORG sensor |
Normally open contact（make contact, Ａ contact）, Photo sensor |
| Pre-ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Compatible cable |
ACB-STD2,ACB-STD3 |