| Direction of travel |
Z axis one direction |
| Travel |
±150mm |
| Stage size |
200mm×200mm |
| Motor used |
Equivalent to PK545 with electromagnetic brake (5 wire type pentagonal connection 0.75A / phase) |
| Resolution |
0.004mm |
| Lead screw |
2mm |
| Guiding method |
Ball ways |
| Travel accuracy HV |
Straightness(horizontal and vertical) 0.02mm |
| Travel accuracy YP |
Yawing 35sec, Pitching 60sec |
| Positioning accuracy |
0.03mm |
| Repeatability |
±0.002mm |
| Lost motion |
0.002mm |
| Moment rigidity |
Yaw rigidity 0.03sec/N・cm, Pitch rigidity 0.5sec/N・cm, Roll rigidity 0.4sec/N・cm |
| Load capacity |
78.4N（8kgf） |
| Weight |
18.5kg |
| Maximum speed |
20mm/s（5,000pps） |
| Material / Surface treatment |
Aluminium alloy / White alumite |
| ORG sensor |
Normally open contact（make contact, Ａ contact）, Photo sensor |
| Pre-ORG sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Limit sensor |
Normally closed contact (break contact, B contact), Photo sensor |
| Compatible cable |
ACB-STD2,ACB-STD3 |