| Direction of travel |
Z axis one direction |
| Travel |
±25mm |
| Stage size |
125mm×160mm |
| Motor used |
Equivalent to PK545 with electromagnetic brake (5-wire type pentagonal connection,0.75A/phase) |
| Resolution |
0.002mm |
| Lead screw |
1mm |
| Guiding method |
V-grooved ways and cross rollers |
| Travel accuracy HV |
Straightness(horizontal and vertical)0.0008mm |
| Travel accuracy YP |
Yawing・Pitching6sec |
| Positioning accuracy |
0.003mm |
| Repeatability |
±0.0005mm |
| Lost motion |
0.0005mm |
| Moment rigidity |
Yawing rigidity 0.05sec/N・cm,Pitching rigidityb0.1sec/N・cm,Rolling rigidity 0.05sec/N・cm |
| Load capacity |
98N（10kgf） |
| Weight |
12.5kg |
| Maximum speed |
10mm/s（5,000pps） |
| Material / Surface treatment |
Steel material/Kanigen plating
（table）,painting（Bases） |
| ORG sensor |
Normally open contact（make contact,Ａcontact）operation.Photomicro Sensors |
| Pre-ORG sensor |
Normally closed contact (Break contact, B contact) operation.Photomicro Sensors |
| Limit sensor |
Normally closed contact (Break contact, B contact) operation.Photomicro Sensors |
| Compatible cable |
ACB-STD2,ACB-STD3 |
| Scale model |
Made of GSI Mercury（Glass scale,cable length1m） |